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last 30 patents
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Patent Grant
Loading apparatus and physical vapor deposition apparatus
Patent number
11,315,768
Issue date
Apr 26, 2022
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xuewei Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
MAGNETRON SPUTTERING APPARATUS
Publication number
20240068087
Publication date
Feb 29, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Shubo WU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LOADING APPARATUS AND PHYSICAL VAPOR DEPOSITION APPARATUS
Publication number
20200144035
Publication date
May 7, 2020
Beijing NAURA Microelectronics Equipment Co., Ltd.
Xuewei WU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...