Yayi Wei

Person

Beijing, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 12,237,213
- Issue date Feb 25, 2025
- Institute of Microelectronics, Chinese Academy of Sciences
- Libin Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for optimizing mask parameters
- Patent number 12,222,641
- Issue date Feb 11, 2025
- Institute of Microelectronics, Chinese Academy of Sciences
- Jianfang He
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 12,198,930
- Issue date Jan 14, 2025
- Institute of Microelectronics, Chinese Academy of Sciences
- Libin Zhang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL METHOD AND APPARATUS FOR QUICKLY REALIZING PRECISE CALIBRAT...
- Publication number 20240345488
- Publication date Oct 17, 2024
- Institute of Microelectronics, Chinese Academy of Sciences
- Dandan Han
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR CORRECTING PROXIMITY EFFECT OF ELECTRON BEAM
- Publication number 20240184217
- Publication date Jun 6, 2024
- Institute of Microelectronics, Chinese Academy of Sciences
- Jian Xu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR OPTIMIZING MASK PARAMETERS
- Publication number 20240176228
- Publication date May 30, 2024
- Institute of Microelectronics, Chinese Academy of Sciences
- Jianfang HE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CORRECTING LITHOGRAPHY PATTERN OF SURFACE PLASMA
- Publication number 20240077799
- Publication date Mar 7, 2024
- Institute of Microelectronics, Chinese Academy of Sciences
- Le Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240055254
- Publication date Feb 15, 2024
- Institute of Microelectronics, Chinese Academy of Sciences
- Libin Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240038584
- Publication date Feb 1, 2024
- Institute of Microelectronics, Chinese Academy of Sciences
- Libin Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR OPTIMIZING LITHOGRAPHY QUALITY, ELECTRONIC...
- Publication number 20240005064
- Publication date Jan 4, 2024
- Institute of Microelectronics, Chinese Academy of Sciences
- Lihong Liu
- G06 - COMPUTING CALCULATING COUNTING

Person

Patents Grantslast 30 patents

Method for manufacturing semiconductor device

Method and device for optimizing mask parameters

Method for manufacturing semiconductor device

Patents Applicationslast 30 patents

OPTICAL METHOD AND APPARATUS FOR QUICKLY REALIZING PRECISE CALIBRAT...

METHOD AND APPARATUS FOR CORRECTING PROXIMITY EFFECT OF ELECTRON BEAM

METHOD AND DEVICE FOR OPTIMIZING MASK PARAMETERS

METHOD FOR CORRECTING LITHOGRAPHY PATTERN OF SURFACE PLASMA

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD AND APPARATUS FOR OPTIMIZING LITHOGRAPHY QUALITY, ELECTRONIC...