Yaying Chen

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Dual wafer stage switching system for a lithography machine
- Patent number 9,547,245
- Issue date Jan 17, 2017
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DUAL WAFER STAGE SWITCHING SYSTEM FOR A LITHOGRAPHY MACHINE
- Publication number 20140071422
- Publication date Mar 13, 2014
- TSINGHUA UNIVERSITY
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY