Ye Feng

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Optical metrology in machine learning to characterize features
- Patent number 11,921,433
- Issue date Mar 5, 2024
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Integrated wafer bow measurements
- Patent number 11,885,750
- Issue date Jan 30, 2024
- Lam Research Corporation
- Rajan Arora
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etch model calibration using optical scatterometry
- Patent number 11,704,463
- Issue date Jul 18, 2023
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of etch model calibration using optical scatterometry
- Patent number 10,997,345
- Issue date May 4, 2021
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for combining optical metrology with mass metro...
- Patent number 10,989,652
- Issue date Apr 27, 2021
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of feature exaction from time-series of spectra to control e...
- Patent number 10,847,430
- Issue date Nov 24, 2020
- Lam Research Corporation
- Ye Feng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Correction of angular error of plane-of-incidence azimuth of optica...
- Patent number 10,621,264
- Issue date Apr 14, 2020
- Onto Innovation Inc.
- Pedro Vagos
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of etch model calibration using optical scatterometry
- Patent number 10,572,697
- Issue date Feb 25, 2020
- Lam Research Corporation
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Correction of angular error of plane-of-incidence azimuth of optica...
- Patent number 10,296,554
- Issue date May 21, 2019
- Nanometrics Incorporated
- Pedro Vagos
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of feature exaction from time-series of spectra to control e...
- Patent number 10,262,910
- Issue date Apr 16, 2019
- Lam Research Corporation
- Ye Feng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement of a sample using multiple models
- Patent number 8,501,501
- Issue date Aug 6, 2013
- Nanometrics Incorporated
- Ye Feng
- G01 - MEASURING TESTING
Information Patent Grant
In-plane optical metrology
- Patent number 8,462,345
- Issue date Jun 11, 2013
- Nanometrics Incorporated
- Ye Feng
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Measurement of a sample using multiple models
- Patent number 8,252,608
- Issue date Aug 28, 2012
- Nanometrics Incorporated
- Ye Feng
- G01 - MEASURING TESTING
Information Patent Grant
In-plane optical metrology
- Patent number 8,068,228
- Issue date Nov 29, 2011
- Nanometrics Incorporated
- Ye Feng
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Measurement of a sample using multiple models
- Patent number 8,062,910
- Issue date Nov 22, 2011
- Nanometrics Incorporated
- Ye Feng
- G01 - MEASURING TESTING
Information Patent Grant
Measurement of a sample using multiple models
- Patent number 7,465,590
- Issue date Dec 16, 2008
- Nanometrics Incorporated
- Ye Feng
- G01 - MEASURING TESTING
Information Patent Grant
Correction of optical metrology for focus offset
- Patent number 7,450,225
- Issue date Nov 11, 2008
- Nanometrics Incorporated
- Zhuan Liu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
IN SITU SENSOR AND LOGIC FOR PROCESS CONTROL
- Publication number 20240255858
- Publication date Aug 1, 2024
- LAM RESEARCH CORPORATION
- Ye Feng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTEGRATED WAFER BOW MEASUREMENTS
- Publication number 20240094144
- Publication date Mar 21, 2024
- LAM RESEARCH CORPORATION
- Rajan Arora
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MACHINE-LEARNING IN MULTI-STEP SEMICONDUCTOR FABRICATION PROCESSES
- Publication number 20240096713
- Publication date Mar 21, 2024
- LAM RESEARCH CORPORATION
- Yan Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ADAPTIVE MODEL TRAINING FOR PROCESS CONTROL OF SEMICONDUCTOR MANUFA...
- Publication number 20240047248
- Publication date Feb 8, 2024
- LAM RESEARCH CORPORATION
- Dipongkar Talukder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LARGE SPOT SPECTRAL SENSING TO CONTROL SPATIAL SETPOINTS
- Publication number 20220334554
- Publication date Oct 20, 2022
- LAM RESEARCH CORPORATION
- Ye Feng
- G05 - CONTROLLING REGULATING
Information Patent Application
INTEGRATED WAFER BOW MEASUREMENTS
- Publication number 20220074869
- Publication date Mar 10, 2022
- LAM RESEARCH CORPORATION
- Rajan Arora
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
- Publication number 20210216695
- Publication date Jul 15, 2021
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL METROLOGY IN MACHINE LEARNING TO CHARACTERIZE FEATURES
- Publication number 20210035833
- Publication date Feb 4, 2021
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
- Publication number 20200218844
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY
- Publication number 20190311083
- Publication date Oct 10, 2019
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CORRECTION OF ANGULAR ERROR OF PLANE-OF-INCIDENCE AZIMUTH OF OPTICA...
- Publication number 20190272305
- Publication date Sep 5, 2019
- Nanometrics Incorporated
- Pedro VAGOS
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of Feature Exaction from Time-series of Spectra to Control E...
- Publication number 20190244870
- Publication date Aug 8, 2019
- LAM RESEARCH CORPORATION
- Ye Feng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR COMBINING OPTICAL METROLOGY WITH MASS METRO...
- Publication number 20190072482
- Publication date Mar 7, 2019
- LAM RESEARCH CORPORATION
- Ye Feng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PROXY APPARATUS AND METHOD FOR DATA COLLECTION
- Publication number 20180302486
- Publication date Oct 18, 2018
- FutureWei Technologies, Inc.
- Lin Ma
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Method of Feature Exaction from Time-series of Spectra to Control E...
- Publication number 20180182632
- Publication date Jun 28, 2018
- LAM RESEARCH CORPORATION
- Ye Feng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORE LOAD KNOWLEDGE FOR ELASTIC LOAD BALANCING OF THREADS
- Publication number 20170039093
- Publication date Feb 9, 2017
- FutureWei Technologies, Inc.
- Zongfang Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CORRECTION OF ANGULAR ERROR OF PLANE-OF-INCIDENCE AZIMUTH OF OPTICA...
- Publication number 20140249768
- Publication date Sep 4, 2014
- Pedro Vagos
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
In-Plane Optical Metrology
- Publication number 20120039568
- Publication date Feb 16, 2012
- Nanometrics Incorporated
- Ye Feng
- G02 - OPTICS
Information Patent Application
In-Plane Optical Metrology
- Publication number 20090040613
- Publication date Feb 12, 2009
- Nanometrics Incorporated
- Ye Feng
- G02 - OPTICS
Information Patent Application
Fiber optic tap with compensated spectral filter
- Publication number 20040156596
- Publication date Aug 12, 2004
- ADC Telecommunications, Inc.
- Craig A. Parsons
- G02 - OPTICS

Person

Patents Grantslast 30 patents

Optical metrology in machine learning to characterize features

Integrated wafer bow measurements

Method of etch model calibration using optical scatterometry

Method of etch model calibration using optical scatterometry

Systems and methods for combining optical metrology with mass metro...

Method of feature exaction from time-series of spectra to control e...

Correction of angular error of plane-of-incidence azimuth of optica...

Method of etch model calibration using optical scatterometry

Correction of angular error of plane-of-incidence azimuth of optica...

Method of feature exaction from time-series of spectra to control e...

Measurement of a sample using multiple models

In-plane optical metrology

Measurement of a sample using multiple models

In-plane optical metrology

Measurement of a sample using multiple models

Measurement of a sample using multiple models

Correction of optical metrology for focus offset

Patents Applicationslast 30 patents

IN SITU SENSOR AND LOGIC FOR PROCESS CONTROL

INTEGRATED WAFER BOW MEASUREMENTS

MACHINE-LEARNING IN MULTI-STEP SEMICONDUCTOR FABRICATION PROCESSES

ADAPTIVE MODEL TRAINING FOR PROCESS CONTROL OF SEMICONDUCTOR MANUFA...

LARGE SPOT SPECTRAL SENSING TO CONTROL SPATIAL SETPOINTS

INTEGRATED WAFER BOW MEASUREMENTS

METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY

OPTICAL METROLOGY IN MACHINE LEARNING TO CHARACTERIZE FEATURES

METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY

METHOD OF ETCH MODEL CALIBRATION USING OPTICAL SCATTEROMETRY

CORRECTION OF ANGULAR ERROR OF PLANE-OF-INCIDENCE AZIMUTH OF OPTICA...

Method of Feature Exaction from Time-series of Spectra to Control E...

SYSTEMS AND METHODS FOR COMBINING OPTICAL METROLOGY WITH MASS METRO...

PROXY APPARATUS AND METHOD FOR DATA COLLECTION

Method of Feature Exaction from Time-series of Spectra to Control E...

CORE LOAD KNOWLEDGE FOR ELASTIC LOAD BALANCING OF THREADS

CORRECTION OF ANGULAR ERROR OF PLANE-OF-INCIDENCE AZIMUTH OF OPTICA...

In-Plane Optical Metrology

In-Plane Optical Metrology

Fiber optic tap with compensated spectral filter