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last 30 patents
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Patent Grant
Tray device, reaction chamber and MOCVD apparatus
Patent number
10,428,424
Issue date
Oct 1, 2019
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Ye Tu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
TRAY DEVICE, REACTION CHAMBER AND MOCVD APPARATUS
Publication number
20150284846
Publication date
Oct 8, 2015
Beijing NMC Co., Ltd.
Ye Tu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...