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Ye Yang
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Fremont, CA, US
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last 30 patents
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Patent Grant
Objective lens with deflector plates immersed in electrostatic lens...
Patent number
8,698,093
Issue date
Apr 15, 2014
KLA-Tencor Corporation
Alexander J. Gubbens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for e-beam dark imaging with perspective control
Patent number
7,838,833
Issue date
Nov 23, 2010
KLA-Tencor Technologies Corporation
Matthew Lent
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for obtaining topographical dark-field images...
Patent number
7,714,287
Issue date
May 11, 2010
KLA-Tencor Corporation
Edward M. James
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated segmented scintillation detector
Patent number
7,560,703
Issue date
Jul 14, 2009
KLA-Tencor Corporation
David A. Soltz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charge-control method and apparatus for electron beam imaging
Patent number
7,488,938
Issue date
Feb 10, 2009
KLA-Tencor Technologies Corporation
Alexander Jozef Gubbens
G01 - MEASURING TESTING