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Suwon-si, KR
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last 30 patents
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Patent Grant
Extreme ultraviolet light source system
Patent number
11,415,891
Issue date
Aug 16, 2022
Samsung Electronics Co., Ltd.
Sunghyup Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light source systems
Patent number
11,304,287
Issue date
Apr 12, 2022
Samsung Electronics Co., Ltd.
Sunghyup Kim
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240142886
Publication date
May 2, 2024
Samsung Electronics Co., Ltd.
Injae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
Publication number
20240121877
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Injae LEE
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEMS
Publication number
20220104336
Publication date
Mar 31, 2022
Samsung Electronics Co., Ltd.
SUNGHYUP KIM
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM
Publication number
20220075271
Publication date
Mar 10, 2022
Samsung Electronics Co., Ltd.
Sunghyup Kim
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY