Yee-Shian Henry TONG

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Hsinchu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Shock wave visualization for extreme ultraviolet plasma optimization
- Patent number 11,452,197
- Issue date Sep 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Shuo Su
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION
- Publication number 20220361311
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Shuo SU
- G01 - MEASURING TESTING
Information Patent Application
SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION
- Publication number 20200137864
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Shuo SU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
- Publication number 20200004159
- Publication date Jan 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhan-Hong YEH
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR