Yeh-Jen Kao

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Concentration profile on demand gas delivery system (individual div...
- Patent number 7,011,710
- Issue date Mar 14, 2006
- Applied Materials Inc.
- Won Bang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for constructing a film on a semiconductor wafer
- Patent number 6,699,530
- Issue date Mar 2, 2004
- Applied Materials, Inc.
- Michal Danek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for depositing low K dielectric materials
- Patent number 6,176,198
- Issue date Jan 23, 2001
- Applied Materials, Inc.
- Yeh-Jen Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for constructing an oxidized film on a semiconductor wafer
- Patent number 6,155,198
- Issue date Dec 5, 2000
- Applied Materials, Inc.
- Michael Danek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual channel gas distribution plate
- Patent number 6,148,761
- Issue date Nov 21, 2000
- Applied Materials, Inc.
- Robert Majewski
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Programmable electrical interlock system for a vacuum processing sy...
- Patent number 6,086,676
- Issue date Jul 11, 2000
- Applied Materials, Inc.
- Yeh-Jen Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Chamber for constructing a film on a semiconductor wafer
- Publication number 20040099215
- Publication date May 27, 2004
- APPLIED MATERIALS, INC.
- Michal Danek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER FOR CONSTRUCTING A FILM ON A SEMICONDUCTOR WAFER
- Publication number 20020001976
- Publication date Jan 3, 2002
- MICHAL DANEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Concentration profile on demand gas delivery system (individual div...
- Publication number 20020000195
- Publication date Jan 3, 2002
- Won Bang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yeh-Jen Kao

Person

Patents Grantslast 30 patents

Concentration profile on demand gas delivery system (individual div...

Method for constructing a film on a semiconductor wafer

Apparatus and method for depositing low K dielectric materials

Apparatus for constructing an oxidized film on a semiconductor wafer

Dual channel gas distribution plate

Programmable electrical interlock system for a vacuum processing sy...

Patents Applicationslast 30 patents

Chamber for constructing a film on a semiconductor wafer

CHAMBER FOR CONSTRUCTING A FILM ON A SEMICONDUCTOR WAFER

Concentration profile on demand gas delivery system (individual div...