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Yen-Chu Yang
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Temperature control of chemical mechanical polishing
Patent number
12,214,468
Issue date
Feb 4, 2025
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Grant
Slurry distribution device for chemical mechanical polishing
Patent number
11,986,926
Issue date
May 21, 2024
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Slurry distribution device for chemical mechanical polishing
Patent number
11,806,835
Issue date
Nov 7, 2023
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Slurry distribution device for chemical mechanical polishing
Patent number
11,077,536
Issue date
Aug 3, 2021
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Slurry distribution device for chemical mechanical polishing
Patent number
10,967,483
Issue date
Apr 6, 2021
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
Publication number
20220402096
Publication date
Dec 22, 2022
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
Publication number
20210331288
Publication date
Oct 28, 2021
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
Publication number
20210205953
Publication date
Jul 8, 2021
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY TEMPERATURE CONTROL BY MIXING AT DISPENSING
Publication number
20210046603
Publication date
Feb 18, 2021
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Application
LOW-TEMPERATURE METAL CMP FOR MINIMIZING DISHING AND CORROSION, AND...
Publication number
20210046602
Publication date
Feb 18, 2021
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Application
Temperature Control of Chemical Mechanical Polishing
Publication number
20190143476
Publication date
May 16, 2019
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
Publication number
20170368663
Publication date
Dec 28, 2017
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
Publication number
20170368664
Publication date
Dec 28, 2017
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL OF POLISHING OF MULTIPLE SUBSTRATES ON THE SAME PLATEN IN C...
Publication number
20140030956
Publication date
Jan 30, 2014
Jimin Zhang
B24 - GRINDING POLISHING