Yen-Huei Su

Person

Shioushuei Shiang, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Mitigating long-term energy decay of laser devices
- Patent number 12,147,166
- Issue date Nov 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ping Yen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for mitigating contamination
- Patent number 12,130,555
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ping Yen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Shock wave visualization for extreme ultraviolet plasma optimization
- Patent number 12,114,412
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Shuo Su
- G01 - MEASURING TESTING
Information Patent Grant
EUV light source and apparatus for lithography
- Patent number 11,979,971
- Issue date May 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Shuo Su
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Semiconductor package with through vias and stacked redistribution...
- Patent number 11,894,341
- Issue date Feb 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsung-Ding Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target control in extreme ultraviolet lithography systems using abe...
- Patent number 11,860,544
- Issue date Jan 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Ya Cheng
- G02 - OPTICS
Information Patent Grant
Control system for plasma chamber having controllable valve
- Patent number 11,821,089
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Shuo Su
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shock wave visualization for extreme ultraviolet plasma optimization
- Patent number 11,800,626
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Shuo Su
- G01 - MEASURING TESTING
Information Patent Grant
Mitigating long-term energy decay of laser devices
- Patent number 11,720,035
- Issue date Aug 8, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ping Yen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor package
- Patent number 11,705,408
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi-Yang Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for mitigating contamination
- Patent number 11,675,272
- Issue date Jun 13, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Ping Yen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Thermal controlling method in lithography system
- Patent number 11,506,986
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi Yang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Shock wave visualization for extreme ultraviolet plasma optimization
- Patent number 11,452,197
- Issue date Sep 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Shuo Su
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target control in extreme ultraviolet lithography systems using abe...
- Patent number 11,340,531
- Issue date May 24, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Ya Cheng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
- Patent number 11,153,959
- Issue date Oct 19, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Chia Hsu
- G02 - OPTICS
Information Patent Grant
Method for fabricating magnetic core
- Patent number 11,133,374
- Issue date Sep 28, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Shuo Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Projection apparatus and projection method thereof
- Patent number 11,128,844
- Issue date Sep 21, 2021
- Coretronic Corporation
- Yen-Hsien Su
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Package structure and method of forming the same
- Patent number 11,004,812
- Issue date May 11, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tuan-Yu Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control system for plasma chamber having controllable valve and met...
- Patent number 10,787,742
- Issue date Sep 29, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Shuo Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating magnetic core
- Patent number 10,461,145
- Issue date Oct 29, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Shuo Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic memory with metal oxide etch stop layer and method for man...
- Patent number 10,170,536
- Issue date Jan 1, 2019
- Taiwan Semiconductor Manufacturing Company Ltd.
- Hung-Wen Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic core, inductor, and method for fabricating the magnetic core
- Patent number 9,893,141
- Issue date Feb 13, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Shuo Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone EPD detectors
- Patent number 9,887,071
- Issue date Feb 6, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-An Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma chamber having an upper electrode having controllable valves...
- Patent number 9,840,778
- Issue date Dec 12, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Shuo Su
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated magnetic core inductor and methods of fabrications thereof
- Patent number 9,799,721
- Issue date Oct 24, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Tsung Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power supply device and projection apparatus using the same
- Patent number 7,705,572
- Issue date Apr 27, 2010
- Coretronic Corporation
- Nan-Jiun Yin
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Wafer shipping device and storage method for preventing fluoridatio...
- Patent number 7,185,764
- Issue date Mar 6, 2007
- Macronix International Co., Ltd.
- Hung-Wen Lee
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Metal-insulator-metal capacitor structure
- Patent number 6,934,143
- Issue date Aug 23, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.
- You-Hua Chou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240385540
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chieh CHANG
- G02 - OPTICS
Information Patent Application
MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES
- Publication number 20240385542
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ping YEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR MITIGATING CONTAMINATION
- Publication number 20240369938
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ping YEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR PACKAGE
- Publication number 20240128232
- Publication date Apr 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tsung-Ding Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING ABE...
- Publication number 20240085797
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Ya CHENG
- G02 - OPTICS
Information Patent Application
MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES
- Publication number 20230400787
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ping YEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION
- Publication number 20230380044
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Shuo SU
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR PACKAGE
- Publication number 20230307385
- Publication date Sep 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Yang Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF REDUCING DESIGN RULE VIOLATIONS DUE TO IR DROPS
- Publication number 20230274072
- Publication date Aug 31, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fa ZHOU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR MITIGATING CONTAMINATION
- Publication number 20230273525
- Publication date Aug 31, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ping YEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES
- Publication number 20230069707
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ping YEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR MITIGATING CONTAMINATION
- Publication number 20230062653
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Ping YEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION
- Publication number 20220361311
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Shuo SU
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20220350264
- Publication date Nov 3, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chieh CHANG
- G02 - OPTICS
Information Patent Application
EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
- Publication number 20220338333
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Shuo SU
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
TARGET CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING ABE...
- Publication number 20220283507
- Publication date Sep 8, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Ya CHENG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR PACKAGE
- Publication number 20220270987
- Publication date Aug 25, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Yang Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING ABE...
- Publication number 20220011675
- Publication date Jan 13, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ting-Ya CHENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THERMAL CONTROLLING METHOD IN LITHOGRAPHY SYSTEM
- Publication number 20210318625
- Publication date Oct 14, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PACKAGE AND MANUFACTURING METHOD THEREOF
- Publication number 20210242172
- Publication date Aug 5, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tsung-Ding Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL SYSTEM FOR PLASMA CHAMBER HAVING CONTROLLABLE VALVE
- Publication number 20210010137
- Publication date Jan 14, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Shuo SU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION
- Publication number 20200137864
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Shuo SU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROJECTION APPARATUS AND PROJECTION METHOD THEREOF
- Publication number 20200099900
- Publication date Mar 26, 2020
- CORETRONIC CORPORATION
- Yen-Hsien Su
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
PACKAGE STRUCTURE AND METHOD OF FORMING THE SAME
- Publication number 20200091097
- Publication date Mar 19, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tuan-Yu Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING MAGNETIC CORE
- Publication number 20200066832
- Publication date Feb 27, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Shuo SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
- Publication number 20200060015
- Publication date Feb 20, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Chia HSU
- G02 - OPTICS
Information Patent Application
EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
- Publication number 20200008290
- Publication date Jan 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Shuo SU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MAGNETIC MEMORY WITH METAL OXIDE ETCH STOP LAYER AND METHOD FOR MAN...
- Publication number 20180366536
- Publication date Dec 20, 2018
- Taiwan Semiconductor Manufacturing company Ltd.
- HUNG-WEN HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING MAGNETIC CORE
- Publication number 20180166527
- Publication date Jun 14, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Shuo SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL SYSTEM FOR PLASMA CHAMBER HAVING CONTROLLABLE VALVE AND MET...
- Publication number 20180073144
- Publication date Mar 15, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Shuo SU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yen-Huei Su

Person

Patents Grantslast 30 patents

Mitigating long-term energy decay of laser devices

Method and apparatus for mitigating contamination

Shock wave visualization for extreme ultraviolet plasma optimization

EUV light source and apparatus for lithography

Semiconductor package with through vias and stacked redistribution...

Target control in extreme ultraviolet lithography systems using abe...

Control system for plasma chamber having controllable valve

Shock wave visualization for extreme ultraviolet plasma optimization

Mitigating long-term energy decay of laser devices

Semiconductor package

Method and apparatus for mitigating contamination

Thermal controlling method in lithography system

Shock wave visualization for extreme ultraviolet plasma optimization

Target control in extreme ultraviolet lithography systems using abe...

Apparatus and method for generating extreme ultraviolet radiation

Method for fabricating magnetic core

Projection apparatus and projection method thereof

Package structure and method of forming the same

Control system for plasma chamber having controllable valve and met...

Method for fabricating magnetic core

Magnetic memory with metal oxide etch stop layer and method for man...

Magnetic core, inductor, and method for fabricating the magnetic core

Multi-zone EPD detectors

Plasma chamber having an upper electrode having controllable valves...

Integrated magnetic core inductor and methods of fabrications thereof

Power supply device and projection apparatus using the same

Wafer shipping device and storage method for preventing fluoridatio...

Metal-insulator-metal capacitor structure

Patents Applicationslast 30 patents

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES

METHOD AND APPARATUS FOR MITIGATING CONTAMINATION

SEMICONDUCTOR PACKAGE

TARGET CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING ABE...

MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES

SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION

SEMICONDUCTOR PACKAGE

METHOD OF REDUCING DESIGN RULE VIOLATIONS DUE TO IR DROPS

METHOD AND APPARATUS FOR MITIGATING CONTAMINATION

MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES

METHOD AND APPARATUS FOR MITIGATING CONTAMINATION

SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY

TARGET CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING ABE...

SEMICONDUCTOR PACKAGE

TARGET CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING ABE...

THERMAL CONTROLLING METHOD IN LITHOGRAPHY SYSTEM

SEMICONDUCTOR PACKAGE AND MANUFACTURING METHOD THEREOF

CONTROL SYSTEM FOR PLASMA CHAMBER HAVING CONTROLLABLE VALVE

SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION

PROJECTION APPARATUS AND PROJECTION METHOD THEREOF

PACKAGE STRUCTURE AND METHOD OF FORMING THE SAME

METHOD FOR FABRICATING MAGNETIC CORE

APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION

EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY

MAGNETIC MEMORY WITH METAL OXIDE ETCH STOP LAYER AND METHOD FOR MAN...

METHOD FOR FABRICATING MAGNETIC CORE

CONTROL SYSTEM FOR PLASMA CHAMBER HAVING CONTROLLABLE VALVE AND MET...