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Yen-Kung Victor Wang
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Fremont, CA, US
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last 30 patents
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Patent Grant
In situ substrate holder leveling method and apparatus
Patent number
7,413,612
Issue date
Aug 19, 2008
Applied Materials, Inc.
Kirby Floyd
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
In Situ Substrate Holder Leveling Method and Apparatus
Publication number
20080286444
Publication date
Nov 20, 2008
Applied Materials, Inc.
Kirby Floyd
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
In situ substrate holder leveling method and apparatus
Publication number
20050006556
Publication date
Jan 13, 2005
Applied Materials, Inc.
Kirby Floyd
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...