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Fill structures with air gaps
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Patent number 12,324,199
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Issue date Jun 3, 2025
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Taiwan Semiconductor Manufacturing Company, Ltd
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Hsiu-Yung Lin
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H01 - BASIC ELECTRIC ELEMENTS
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Fill structures with air gaps
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Patent number 11,961,884
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Issue date Apr 16, 2024
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Taiwan Semiconductor Manufacturing Company, Ltd
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Hsiu-Yung Lin
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor device
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Patent number 10,818,790
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Issue date Oct 27, 2020
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Taiwan Semiconductor Manufacturing Co., Ltd
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Chih-Fen Chen
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H01 - BASIC ELECTRIC ELEMENTS
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