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Albany, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for patterning a dielectric layer
Patent number
11,756,790
Issue date
Sep 12, 2023
Tokyo Electron Limited
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
ALD (atomic layer deposition) liner for via profile control and rel...
Patent number
11,742,241
Issue date
Aug 29, 2023
Tokyo Electron Limited
Xinghua Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Split ash processes for via formation to suppress damage to low-K l...
Patent number
11,721,578
Issue date
Aug 8, 2023
Tokyo Electron Limited
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for using ultra thin ruthenium metal hard mask for etching p...
Patent number
11,688,604
Issue date
Jun 27, 2023
Tokyo Electron Limited
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective deposition of conductive cap for fully-aligned-via (FAV)
Patent number
11,515,203
Issue date
Nov 29, 2022
Tokyo Electron Limited
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radiation of substrates during processing and systems thereof
Patent number
11,289,325
Issue date
Mar 29, 2022
Tokyo Electron Limited
Michael Edley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
ALD (atomic layer deposition) liner for via profile control and rel...
Patent number
11,164,781
Issue date
Nov 2, 2021
Tokyo Electron Limited
Xinghua Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High aspect ratio via etch using atomic layer deposition protection...
Patent number
11,121,027
Issue date
Sep 14, 2021
Tokyo Electron Limited
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic layer deposition for low-K trench protection during etch
Patent number
10,964,587
Issue date
Mar 30, 2021
Tokyo Electron Limited
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal hard mask layers for processing of microelectronic workpieces
Patent number
10,950,444
Issue date
Mar 16, 2021
Tokyo Electron Limited
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR PATTERNING A DIELECTRIC LAYER
Publication number
20220293419
Publication date
Sep 15, 2022
TOKYO ELECTRON LIMITED
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Radiation of Substrates During Processing and Systems Thereof
Publication number
20220189764
Publication date
Jun 16, 2022
TOKYO ELECTRON LIMITED
Michael Edley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALD (ATOMIC LAYER DEPOSITION) LINER FOR VIA PROFILE CONTROL AND REL...
Publication number
20220020642
Publication date
Jan 20, 2022
TOKYO ELECTRON LIMITED
Xinghua Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Radiation of Substrates During Processing and Systems Thereof
Publication number
20210407790
Publication date
Dec 30, 2021
TOKYO ELECTRON LIMITED
Michael Edley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIELECTRIC ETCH STOP LAYER FOR REACTIVE ION ETCH (RIE) LAG REDUCTIO...
Publication number
20210265205
Publication date
Aug 26, 2021
TOKYO ELECTRON LIMITED
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE DEPOSITION OF CONDUCTIVE CAP FOR FULLY-ALIGNED-VIA (FAV)
Publication number
20210242074
Publication date
Aug 5, 2021
TOKYO ELECTRON LIMITED
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SPLIT ASH PROCESSES FOR VIA FORMATION TO SUPPRESS DAMAGE TO LOW-K L...
Publication number
20210151350
Publication date
May 20, 2021
TOKYO ELECTRON LIMITED
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR USING ULTRA THIN RUTHENIUM METAL HARD MASK FOR ETCHING P...
Publication number
20210028017
Publication date
Jan 28, 2021
TOKYO ELECTRON LIMITED
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALD (ATOMIC LAYER DEPOSITION) LINER FOR VIA PROFILE CONTROL AND REL...
Publication number
20200051859
Publication date
Feb 13, 2020
TOKYO ELECTRON LIMITED
Xinghua Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Atomic Layer Deposition For Low-K Trench Protection During Etch
Publication number
20190355617
Publication date
Nov 21, 2019
TOKYO ELECTRON LIMITED
David O'Meara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL HARD MASK LAYERS FOR PROCESSING OF MICROELECTRONIC WORKPIECES
Publication number
20190237331
Publication date
Aug 1, 2019
TOKYO ELECTRON LIMITED
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High Aspect Ratio Via Etch Using Atomic Layer Deposition Protection...
Publication number
20190181041
Publication date
Jun 13, 2019
TOKYO ELECTRON LIMITED
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS