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Yen-Wen Lu
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Los Altos, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for improving a process for a patterning process
Patent number
11,977,336
Issue date
May 7, 2024
ASML Netherlands B.V.
Jen-Shiang Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining scattering of radiation by structures of fin...
Patent number
11,789,371
Issue date
Oct 17, 2023
ASML Netherlands B.V.
Yu Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Training methods for machine learning assisted optical proximity er...
Patent number
11,768,440
Issue date
Sep 26, 2023
ASML Netherlands B.V.
Jing Su
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for determining curvilinear patterns for patterning device
Patent number
11,734,490
Issue date
Aug 22, 2023
ASML Netherlands B.V.
Quan Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Training methods for machine learning assisted optical proximity er...
Patent number
11,561,477
Issue date
Jan 24, 2023
ASML Netherlands B.V.
Jing Su
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Identification of hot spots or defects by machine learning
Patent number
11,443,083
Issue date
Sep 13, 2022
ASML Netherlands B.V.
Jing Su
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods of determining scattering of radiation by structures of fin...
Patent number
11,409,203
Issue date
Aug 9, 2022
ASML Netherlands B.V.
Yu Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process window identifier
Patent number
11,379,648
Issue date
Jul 5, 2022
ASML Netherlands B.V.
Frank Gang Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for controlling a computing process
Patent number
11,353,797
Issue date
Jun 7, 2022
ASML Netherlands B.V.
Yen-Wen Lu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining curvilinear patterns for patterning device
Patent number
11,232,249
Issue date
Jan 25, 2022
ASML Netherlands B.V.
Quan Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods of determining scattering of radiation by structures of fin...
Patent number
11,016,395
Issue date
May 25, 2021
ASML Netherlands B.V.
Yu Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining scattering of radiation by structures of fin...
Patent number
10,996,565
Issue date
May 4, 2021
ASML Netherlands B.V.
Peng Liu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods of determining process models by machine learning
Patent number
10,948,831
Issue date
Mar 16, 2021
ASML Netherlands B.V.
Ya Luo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Process window identifier
Patent number
10,755,025
Issue date
Aug 25, 2020
ASML Netherlands B.V.
Frank Gang Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Process based metrology target design
Patent number
10,296,681
Issue date
May 21, 2019
ASML Netherlands B.V.
Guangqing Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Process based metrology target design
Patent number
10,007,744
Issue date
Jun 26, 2018
ASML Netherlands B.V.
Guangqing Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method and apparatus
Patent number
9,903,823
Issue date
Feb 27, 2018
ASML Netherlands B.V.
Yen-Wen Lu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process window identifier
Patent number
9,842,186
Issue date
Dec 12, 2017
ASML Netherlands B.V.
Frank Gang Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for cost function based simultaneous OPC and S...
Patent number
9,619,607
Issue date
Apr 11, 2017
ASML Netherlands B.V.
Jun Tao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for model based flexible MRC
Patent number
9,418,194
Issue date
Aug 16, 2016
ASML Netherlands B.V.
Taihui Liu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multivariable solver for optical proximity correction
Patent number
8,938,699
Issue date
Jan 20, 2015
ASML Netherlands B.V.
William S. Wong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for lithography simulation
Patent number
8,893,067
Issue date
Nov 18, 2014
ASML Netherlands B.V.
Jun Ye
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for enhancing signal strength for improved gen...
Patent number
8,826,198
Issue date
Sep 2, 2014
ASML Netherlands B.V.
Min-Chun Tsai
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for cost function based simultaneous OPC and S...
Patent number
8,812,998
Issue date
Aug 19, 2014
ASML Netherlands B.V.
Jun Tao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for model based flexible MRC
Patent number
8,806,389
Issue date
Aug 12, 2014
ASML Netherlands B.V.
Taihui Liu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of pattern selection for source and mask optimization
Patent number
8,739,082
Issue date
May 27, 2014
Hua-Yu Liu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Local multivariable solver for optical proximity correction in lith...
Patent number
8,560,979
Issue date
Oct 15, 2013
ASML Netherlands B.V.
William S. Wong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for lithography simulation
Patent number
8,516,405
Issue date
Aug 20, 2013
ASML Netherlands B.V.
Jun Ye
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multivariable solver for optical proximity correction
Patent number
8,448,099
Issue date
May 21, 2013
ASML Netherlands B.V.
William S. Wong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for enhancing signal strength for improved gen...
Patent number
8,443,312
Issue date
May 14, 2013
ASML Netherlands B.V.
Min-Chun Tsai
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
TRAINING METHODS FOR MACHINE LEARNING ASSISTED OPTICAL PROXIMITY ER...
Publication number
20240012335
Publication date
Jan 11, 2024
ASML NETHERLANDS B.V.
Jing SU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEMS, METHODS, AND PRODUCTS FOR DETERMINING PRINTING PROBABILITY...
Publication number
20230244152
Publication date
Aug 3, 2023
ASML NETHERLANDS B.V.
Jen-Shiang WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEMS, PRODUCTS, AND METHODS FOR GENERATING PATTERNING DEVICES AN...
Publication number
20230185183
Publication date
Jun 15, 2023
ASML NETHERLANDS B.V.
Jiuning HU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TRAINING METHODS FOR MACHINE LEARNING ASSISTED OPTICAL PROXIMITY ER...
Publication number
20230137097
Publication date
May 4, 2023
ASML NETHERLANDS B.V.
Jing SU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR IMPROVING CONSISTENCY IN MASK PATTERN GENERATION
Publication number
20230044490
Publication date
Feb 9, 2023
Quan ZHANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MACHINE LEARNING BASED IMAGE GENERATION FOR MODEL BASE ALIGNMENTS
Publication number
20220404712
Publication date
Dec 22, 2022
ASML NETHERLANDS B.V.
Qiang ZHANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS OF DETERMINING SCATTERING OF RADIATION BY STRUCTURES OF FIN...
Publication number
20220373892
Publication date
Nov 24, 2022
ASML NETHERLANDS B.V.
Yu CAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR CONTROLLING A COMPUTING PROCESS
Publication number
20220283511
Publication date
Sep 8, 2022
ASML NETHERLANDS B.V.
Yen-Wen LU
G05 - CONTROLLING REGULATING
Information
Patent Application
IDENTIFICATION OF HOT SPOTS OR DEFECTS BY MACHINE LEARNING
Publication number
20220277116
Publication date
Sep 1, 2022
ASML NETHERLANDS B.V.
Jing SU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DETERMINING PATTERN IN A PATTERNING PROCESS
Publication number
20220179321
Publication date
Jun 9, 2022
ASML NETHERLANDS B.V.
Ziyang MA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DETERMINING CURVILINEAR PATTERNS FOR PATTERNING DEVICE
Publication number
20220121804
Publication date
Apr 21, 2022
ASML Netherland B.V.
Quan Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS OF DETERMINING SCATTERING OF RADIATION BY STRUCTURES OF FIN...
Publication number
20210271173
Publication date
Sep 2, 2021
ASML NETHERLANDS B.V.
Yu CAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF DETERMINING PROCESS MODELS BY MACHINE LEARNING
Publication number
20210271172
Publication date
Sep 2, 2021
ASML NETHERLANDS B.V.
Ya Luo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR IMPROVING A PROCESS FOR A PATTERNING PROCESS
Publication number
20210208507
Publication date
Jul 8, 2021
ASML NETHERLANDS B.V.
Jen-Shiang WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR CONTROLLING A COMPUTING PROCESS
Publication number
20210208510
Publication date
Jul 8, 2021
ASML NETHERLANDS B.V.
Yen-Wen LU
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD FOR DETERMINING CURVILINEAR PATTERNS FOR PATTERNING DEVICE
Publication number
20210048753
Publication date
Feb 18, 2021
ASML NETHERLANDS B.V.
Quan ZHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS FOR TRAINING MACHINE LEARNING MODEL FOR COMPUTATION LITHOGR...
Publication number
20200380362
Publication date
Dec 3, 2020
ASML NETHERLANDS B.V.
Yu CAO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PROCESS WINDOW IDENTIFIER
Publication number
20200372201
Publication date
Nov 26, 2020
ASML NETHERLANDS B.V.
Frank Gang CHEN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TRAINING METHODS FOR MACHINE LEARNING ASSISTED OPTICAL PROXIMITY ER...
Publication number
20200356011
Publication date
Nov 12, 2020
ASML NETHERLANDS B.V.
Jing SU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS OF DETERMINING SCATTERING OF RADIATION BY STRUCTURES OF FIN...
Publication number
20200073260
Publication date
Mar 5, 2020
ASML NETHERLANDS B.V.
Yu CAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ASSIST FEATURE PLACEMENT BASED ON MACHINE LEARNING
Publication number
20200050099
Publication date
Feb 13, 2020
ASML NETHERLANDS B.V.
Jing SU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS OF DETERMINING PROCESS MODELS BY MACHINE LEARNING
Publication number
20200026196
Publication date
Jan 23, 2020
ASML NETHERLANDE B.V.
Ya LUO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS OF DETERMINING SCATTERING OF RADIATION BY STRUCTURES OF FIN...
Publication number
20200012196
Publication date
Jan 9, 2020
Peng LIU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
IDENTIFICATION OF HOT SPOTS OR DEFECTS BY MACHINE LEARNING
Publication number
20190147127
Publication date
May 16, 2019
ASML NETHERLANDS B.V.
Jing SU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PROCESS BASED METROLOGY TARGET DESIGN
Publication number
20180268093
Publication date
Sep 20, 2018
ASML NETHERLANDS B.V.
Guangqing CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESS WINDOW IDENTIFIER
Publication number
20180089359
Publication date
Mar 29, 2018
ASML NETHERLANDS B.V.
Frank Gang CHEN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FEATURE SEARCH BY MACHINE LEARNING
Publication number
20170357911
Publication date
Dec 14, 2017
ASML NETHERLANDS B.V.
Xiaofeng LIU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METROLOGY METHOD AND APPARATUS
Publication number
20160146740
Publication date
May 26, 2016
ASML NETHERLANDS B.V.
Yen-Wen Lu
G01 - MEASURING TESTING
Information
Patent Application
PROCESS BASED METROLOGY TARGET DESIGN
Publication number
20160140267
Publication date
May 19, 2016
ASML NETHERLANDS B.V.
Guangqing CHEN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PROCESS WINDOW IDENTIFIER
Publication number
20160085905
Publication date
Mar 24, 2016
ASML NETHERLANDS B.V.
Frank Gang CHEN
G06 - COMPUTING CALCULATING COUNTING