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Yeon Kheng Lim
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Singapore, SG
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last 30 patents
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Patent Grant
Structure and method of liner air gap formation
Patent number
7,094,669
Issue date
Aug 22, 2006
Chartered Semiconductor Manufacturing Ltd.
Xiaomei Bu
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Structure and method of liner air gap formation
Publication number
20060030128
Publication date
Feb 9, 2006
Xiaomei Bu
H01 - BASIC ELECTRIC ELEMENTS