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Yeon Sang Cho
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Seongnam-si, KR
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last 30 patents
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Patent Grant
Electrostatic chuck having reduced arcing
Patent number
9,218,997
Issue date
Dec 22, 2015
Applied Materials, Inc.
Seok Yul Jun
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
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Patent Application
ELECTROSTATIC CHUCK HAVING REDUCED ARCING
Publication number
20100109263
Publication date
May 6, 2010
Seok Yul Jun
H01 - BASIC ELECTRIC ELEMENTS