YEONGKWANG LEE

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Suwon-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for processing substrate and method of manufac...
- Patent number 11,289,308
- Issue date Mar 29, 2022
- Samsung Electronics Co., Ltd.
- Sangjin An
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Antenna, microwave plasma source including the same, plasma process...
- Patent number 10,553,401
- Issue date Feb 4, 2020
- Samsung Electronics Co., Ltd.
- Yeongkwang Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing system, electron beam generator, and method of fa...
- Patent number 10,522,332
- Issue date Dec 31, 2019
- Samsung Electronics Co., Ltd.
- Yeongkwang Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing system, electron beam generator, and method of fa...
- Patent number 10,347,468
- Issue date Jul 9, 2019
- Samsung Electronics Co., Ltd.
- Yeongkwang Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE AND METHOD OF MANUFAC...
- Publication number 20210098232
- Publication date Apr 1, 2021
- Samsung Electronics Co., Ltd.
- Sangjin AN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...
- Publication number 20190279846
- Publication date Sep 12, 2019
- Samsung Electronics Co., Ltd.
- YEONGKWANG LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus and Method of Manufacturing Semiconduct...
- Publication number 20190198296
- Publication date Jun 27, 2019
- Samsung Electronics Co., Ltd.
- SIQING LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...
- Publication number 20190122860
- Publication date Apr 25, 2019
- Samsung Electronics Co., Ltd.
- YEONGKWANG LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTENNA, MICROWAVE PLASMA SOURCE INCLUDING THE SAME, PLASMA PROCESS...
- Publication number 20170330727
- Publication date Nov 16, 2017
- Samsung Electronics Co., Ltd.
- YEONGKWANG LEE
- H01 - BASIC ELECTRIC ELEMENTS