Yeqin Zheng

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Split type aerostatic bearing
- Patent number 8,920,031
- Issue date Dec 30, 2014
- Shanghai Micro Electronics Equipment Co., Ltd.
- Jinchun Li
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
SPLIT TYPE AEROSTATIC BEARING
- Publication number 20140016886
- Publication date Jan 16, 2014
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Jinchun Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY