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Yevgeny Kruptesky
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San Francisco, CA, US
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last 30 patents
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Patent Grant
Methods and systems for determining drift in a position of a light...
Patent number
7,511,816
Issue date
Mar 31, 2009
KLA-Tencor Technologies Corp.
Juergen Reich
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Methods and systems for determining drift in a position of a light...
Publication number
20060285112
Publication date
Dec 21, 2006
Juergen Reich
G01 - MEASURING TESTING