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last 30 patents
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Patent Grant
Method for depositing a very high phosphorus doped silicon oxide film
Patent number
6,893,983
Issue date
May 17, 2005
TECH Semiconductor Singapore Pte Ltd.
Jian Sun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method for depositing a very high phosphorus doped silicon oxide film
Publication number
20040119145
Publication date
Jun 24, 2004
TECH SEMICONDUCOR SINGAPORE PTE. LTD.
Jian Sun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...