Yi Chen

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Sunnyvale, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Boron film interface engineering
- Patent number 8,563,090
- Issue date Oct 22, 2013
- Applied Materials, Inc.
- Mihaela Balseanu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing boron-rich films for lithographic mask applic...
- Patent number 8,337,950
- Issue date Dec 25, 2012
- Applied Materials, Inc.
- Victor Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of integrated polygen deposition and RTP for microelectromechan...
- Patent number 6,605,319
- Issue date Aug 12, 2003
- Applied Materials, Inc.
- Jeffrey D. Chinn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ENGINEERING BORON-RICH FILMS FOR LITHOGRAPHIC MASK APPLICATIONS
- Publication number 20100233633
- Publication date Sep 16, 2010
- Applied Materials, Inc.
- Victor Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON FILM INTERFACE ENGINEERING
- Publication number 20100098884
- Publication date Apr 22, 2010
- Applied Materials, Inc.
- MIHAELA BALSEANU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...