Yi Xu

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Burnaby, CA

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Patents Grantslast 30 patents

Information Patent Grant
Method for improving oxide erosion of tungsten CMP operations
- Patent number 6,569,770
- Issue date May 27, 2003
- Chartered Semiconductor Manufacturing Ltd.
- Xian Bin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to improve adhesion of organic dielectrics in dual damascene...
- Patent number 6,348,407
- Issue date Feb 19, 2002
- Chartered Semiconductor Manufacturing Inc.
- Subhash Gupta
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
New method for improving oxide erosion of tungsten CMP operations
- Publication number 20030003745
- Publication date Jan 2, 2003
- Chartered Semiconductor Manufacturing Ltd.
- Xian Bin Wang
- H01 - BASIC ELECTRIC ELEMENTS