Yia Chung Chang

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Champaign, IL, US

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Patents Grantslast 30 patents

Information Patent Grant
Scatterometry for samples with non-uniform edges
- Patent number 7,233,390
- Issue date Jun 19, 2007
- Therma-Wave, Inc.
- Yia Chung Chang
- G01 - MEASURING TESTING
Information Patent Grant
CD metrology analysis using green's function
- Patent number 7,038,850
- Issue date May 2, 2006
- Therm-Wave, Inc.
- Yia Chung Chang
- G01 - MEASURING TESTING
Information Patent Grant
CD metrology analysis using green's function
- Patent number 6,867,866
- Issue date Mar 15, 2005
- Therma-Wave, Inc.
- Yia Chung Chang
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
CD metrology analysis using green's function
- Publication number 20050137809
- Publication date Jun 23, 2005
- Yia Chung Chang
- G01 - MEASURING TESTING
Information Patent Application
Scatterometry for samples with non-uniform edges
- Publication number 20040201836
- Publication date Oct 14, 2004
- Yia-Chung Chang
- G01 - MEASURING TESTING