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Shanghai, CN
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last 30 patents
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Patent Grant
Wafer holder and wafer transfer apparatus, system and method
Patent number
11,309,209
Issue date
Apr 19, 2022
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Gang Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon wafer processing device and method
Patent number
10,782,615
Issue date
Sep 22, 2020
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Gang Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
WAFER HOLDER AND WAFER TRANSFER APPARATUS, SYSTEM AND METHOD
Publication number
20200286772
Publication date
Sep 10, 2020
Gang WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON WAFER PROCESSING DEVICE AND METHOD
Publication number
20200192228
Publication date
Jun 18, 2020
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Gang WANG
H01 - BASIC ELECTRIC ELEMENTS