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Yifeng Winston Yang
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Orlando, FL, US
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last 30 patents
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Patent Grant
System and method of determining a polishing endpoint by monitoring...
Patent number
6,730,603
Issue date
May 4, 2004
Agere Systems Inc.
Annette M. Crevasse
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
System and method of determining a polishing endpoint by monitoring...
Publication number
20030082844
Publication date
May 1, 2003
Agere Systems Inc.
Annette M. Crevasse
B24 - GRINDING POLISHING