Yih-Song Chiu

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Tainan, TW

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Patents Grantslast 30 patents

Information Patent Grant
System and method for an etch process with silicon concentration co...
- Patent number 9,887,095
- Issue date Feb 6, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fu Yi Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feature dimension measurement
- Patent number 8,049,213
- Issue date Nov 1, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Chung Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feed forward spacer width control in semiconductor manufacturing
- Patent number 7,064,085
- Issue date Jun 20, 2006
- Taiwan Semiconductor Manufacturing Company
- Yih-Song Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming an STI feature to avoid electrical charge leakage
- Patent number 6,972,241
- Issue date Dec 6, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yih Song Chiu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
System and Method for an Etch Process with Silicon Concentration Co...
- Publication number 20140273303
- Publication date Sep 18, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fu-Yi Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR STRIPPING PHOTORESIST AND REMOVING DIELECTRIC LINER
- Publication number 20100240220
- Publication date Sep 23, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Wei CHIU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Feature Dimension Measurement
- Publication number 20090152545
- Publication date Jun 18, 2009
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Chung Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Feed forward spacer width control in semiconductor manufacturing
- Publication number 20060019479
- Publication date Jan 26, 2006
- Yih-Song Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming an STI feature to avoid electrical charge leakage
- Publication number 20050158964
- Publication date Jul 21, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yih Song Chiu
- H01 - BASIC ELECTRIC ELEMENTS