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Beijing, CN
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last 30 patents
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Patent Grant
Method of manufacturing dummy gates in gate last process
Patent number
8,541,296
Issue date
Sep 24, 2013
The Institute Of Microelectronics Chinese Academy of Science
Tao Yang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method for Manufacturing Small-Size Fin-Shaped Structure
Publication number
20140227878
Publication date
Aug 14, 2014
Institute of Microelectronics, Chinese Academy of Sciences
Tao Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING ELECTRODES AND WIRES IN GATE LAST PROCESS
Publication number
20130059434
Publication date
Mar 7, 2013
Tao Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Manufacturing Dummy Gates in Gate Last Process
Publication number
20130059435
Publication date
Mar 7, 2013
Tao Yang
H01 - BASIC ELECTRIC ELEMENTS