Yijun Liu

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Multi-station plasma reactor with multiple plasma regions
- Patent number 8,336,488
- Issue date Dec 25, 2012
- Advanced Micro-Fabrication Equipment, Inc. Asia
- Aihua Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MULTI-STATION PLASMA REACTOR WITH MULTIPLE PLASMA REGIONS
- Publication number 20090139453
- Publication date Jun 4, 2009
- AIHUA CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...