Yijun Liu

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
RF pulsing assisted low-k film deposition with high mechanical stre...
- Patent number 12,125,675
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Ruitong Xiong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single precursor low-k film deposition and UV cure for advanced tec...
- Patent number 12,119,223
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for deposition of low-k films
- Patent number 11,990,332
- Issue date May 21, 2024
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for depositing low-k dielectric films
- Patent number 11,967,498
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for seamless gap filling of dielectric material
- Patent number 11,830,728
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Chengyu Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tensile nitride deposition systems and methods
- Patent number 11,710,631
- Issue date Jul 25, 2023
- Applied Materials, Inc.
- Michael Wenyoung Tsiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for forming UV-cured low-κ dielectric films
- Patent number 11,621,162
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for depositing low-κdielectric films
- Patent number 11,600,486
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for cleaning low-k deposition chambers
- Patent number 11,572,622
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Bo Xie
- B08 - CLEANING
Information Patent Grant
Methods to obtain low k dielectric barrier with superior etch resis...
- Patent number 7,964,442
- Issue date Jun 21, 2011
- Applied Materials, Inc.
- Huiwen Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to mitigate impact of UV and E-beam exposure on semiconducto...
- Patent number 7,851,384
- Issue date Dec 14, 2010
- Applied Materials, Inc.
- Yijun Liu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20240290611
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20240087880
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Shruba Gangopadhyay
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20240087881
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Michael Haverty
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADHESION IMPROVEMENT BETWEEN LOW-K MATERIALS AND CAP LAYERS
- Publication number 20240071817
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Ruitong Xiong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Single Precursor Low-K Film Deposition and UV Cure for Advanced Tec...
- Publication number 20230142684
- Publication date May 11, 2023
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SEAMLESS GAP FILLING OF DIELECTRIC MATERIAL
- Publication number 20230113965
- Publication date Apr 13, 2023
- Chengyu LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF PULSING ASSISTED LOW-K FILM DEPOSITION WITH HIGH MECHANICAL STRE...
- Publication number 20230094012
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Ruitong Xiong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TENSILE NITRIDE DEPOSITION SYSTEMS AND METHODS
- Publication number 20220130661
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Michael Wenyoung Tsiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR FORMING UV-CURED LOW-K DIELECTRIC FILMS
- Publication number 20220108884
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20220084815
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CLEANING LOW-K DEPOSITION CHAMBERS
- Publication number 20220081765
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Bo Xie
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20210407792
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods And Apparatus For Deposition Of Low-K Films
- Publication number 20200332415
- Publication date Oct 22, 2020
- Bhaskar Jyoti Bhuyan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS TO OBTAIN LOW K DIELECTRIC BARRIER WITH SUPERIOR ETCH RESIS...
- Publication number 20090093132
- Publication date Apr 9, 2009
- APPLIED MATERIALS, INC.
- HUIWEN XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO MITIGATE IMPACT OF UV AND E-BEAM EXPOSURE ON SEMICONDUCTO...
- Publication number 20070281497
- Publication date Dec 6, 2007
- APPLIED MATERIALS, INC.
- Yijun Liu
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

RF pulsing assisted low-k film deposition with high mechanical stre...

Single precursor low-k film deposition and UV cure for advanced tec...

Methods and apparatus for deposition of low-k films

Systems and methods for depositing low-k dielectric films

Methods for seamless gap filling of dielectric material

Tensile nitride deposition systems and methods

Systems and methods for forming UV-cured low-κ dielectric films

Systems and methods for depositing low-κdielectric films

Systems and methods for cleaning low-k deposition chambers

Methods to obtain low k dielectric barrier with superior etch resis...

Method to mitigate impact of UV and E-beam exposure on semiconducto...

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

ADHESION IMPROVEMENT BETWEEN LOW-K MATERIALS AND CAP LAYERS

Single Precursor Low-K Film Deposition and UV Cure for Advanced Tec...

METHODS FOR SEAMLESS GAP FILLING OF DIELECTRIC MATERIAL

RF PULSING ASSISTED LOW-K FILM DEPOSITION WITH HIGH MECHANICAL STRE...

TENSILE NITRIDE DEPOSITION SYSTEMS AND METHODS

SYSTEMS AND METHODS FOR FORMING UV-CURED LOW-K DIELECTRIC FILMS

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

SYSTEMS AND METHODS FOR CLEANING LOW-K DEPOSITION CHAMBERS

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

Methods And Apparatus For Deposition Of Low-K Films

METHODS TO OBTAIN LOW K DIELECTRIC BARRIER WITH SUPERIOR ETCH RESIS...

METHOD TO MITIGATE IMPACT OF UV AND E-BEAM EXPOSURE ON SEMICONDUCTO...