Yijun Liu

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Nakakoma-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Thin film forming method
- Patent number 6,485,564
- Issue date Nov 26, 2002
- Tokyo Electron Limited
- Yijun Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single-substrate-processing CVD method of forming film containing m...
- Patent number 6,428,850
- Issue date Aug 6, 2002
- Tokyo Electron Limited
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single-substrate-processing CVD apparatus and method
- Patent number 6,126,753
- Issue date Oct 3, 2000
- Tokyo Electron Limited
- Hiroshi Shinriki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...