Yikai Chen

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate support cover for high-temperature corrosive environment
- Patent number 11,866,821
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Shuran Sheng
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Plasma spray coating design using phase and stress control
- Patent number 11,578,398
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Protective metal oxy-fluoride coatings
- Patent number 11,572,617
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating for chamber particle reduction
- Patent number 11,251,024
- Issue date Feb 15, 2022
- Applied Materials, Inc.
- Hsin-wei Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Protective yttria coating for semiconductor equipment parts
- Patent number 11,047,035
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Ramesh Gopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Smart device fabrication via precision patterning
- Patent number 10,818,481
- Issue date Oct 27, 2020
- Applied Materials, Inc.
- Jennifer Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Slurry plasma spray of plasma resistant ceramic coating
- Patent number 10,730,798
- Issue date Aug 4, 2020
- Applied Materials, Inc.
- Jennifer Sun
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Plasma spray coating design using phase and stress control
- Patent number 10,604,831
- Issue date Mar 31, 2020
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma spray coating enhancement using plasma flame heat treatment
- Patent number 10,468,235
- Issue date Nov 5, 2019
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Advanced layered bulk ceramics via field assisted sintering technology
- Patent number 10,385,459
- Issue date Aug 20, 2019
- Applied Materials, Inc.
- Jennifer Y. Sun
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Plasma spray coating design using phase and stress control
- Patent number 10,196,728
- Issue date Feb 5, 2019
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning process that precipitates yttrium oxy-flouride
- Patent number 9,999,907
- Issue date Jun 19, 2018
- Applied Materials, Inc.
- Chengtsin Lee
- B08 - CLEANING
Information Patent Grant
Smart device fabrication via precision patterning
- Patent number 9,420,639
- Issue date Aug 16, 2016
- Applied Materials, Inc.
- Jennifer Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Heated Pedestal With Impedance Matching Radio Frequency (RF) Rod
- Publication number 20240186123
- Publication date Jun 6, 2024
- Yao-Hung YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTIVE METAL OXY-FLUORIDE COATINGS
- Publication number 20230141782
- Publication date May 11, 2023
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PLASMA SPRAYING SILICON CARBIDE COATINGS...
- Publication number 20230051800
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- YIKAI CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLUORIDE COATING TO IMPROVE CHAMBER PERFORMANCE
- Publication number 20220037126
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING FOR CHAMBER PARTICLE REDUCTION
- Publication number 20210043429
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Hsin-wei TSENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT COVER FOR HIGH-TEMPERATURE CORROSIVE ENVIRONMENT
- Publication number 20200370174
- Publication date Nov 26, 2020
- Applied Materials, Inc.
- Shuran SHENG
- C01 - INORGANIC CHEMISTRY
Information Patent Application
SLURRY PLASMA SPRAY OF PLASMA RESISTANT CERAMIC COATING
- Publication number 20200325073
- Publication date Oct 15, 2020
- Applied Materials, Inc.
- Jennifer Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA SPRAY COATING DESIGN USING PHASE AND STRESS CONTROL
- Publication number 20200190653
- Publication date Jun 18, 2020
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA SPRAY COATING ENHANCEMENT USING PLASMA FLAME HEAT TREATMENT
- Publication number 20200035463
- Publication date Jan 30, 2020
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTIVE YTTRIA COATING FOR SEMICONDUCTOR EQUIPMENT PARTS
- Publication number 20190264314
- Publication date Aug 29, 2019
- Ramesh Gopalan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA SPRAY COATING ENHANCEMENT USING GRADUATED PARTICLE FEED RATE
- Publication number 20190157047
- Publication date May 23, 2019
- Yikai Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA SPRAY COATING DESIGN USING PHASE AND STRESS CONTROL
- Publication number 20190136360
- Publication date May 9, 2019
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING ARCHITECTURE FOR PLASMA SPRAYED CHAMBER COMPONENTS
- Publication number 20180366302
- Publication date Dec 20, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING ARCHITECTURE FOR PLASMA SPRAYED CHAMBER COMPONENTS
- Publication number 20180108517
- Publication date Apr 19, 2018
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTIVE METAL OXY-FLUORIDE COATINGS
- Publication number 20170323772
- Publication date Nov 9, 2017
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING ARCHITECTURE FOR PLASMA SPRAYED CHAMBER COMPONENTS
- Publication number 20170301520
- Publication date Oct 19, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLUTION PRECURSOR PLASMA SPRAY OF CERAMIC COATING FOR SEMICONDUCTO...
- Publication number 20170291856
- Publication date Oct 12, 2017
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING PROCESS THAT PRECIPITATES YTTRIUM OXY-FLOURIDE
- Publication number 20170282221
- Publication date Oct 5, 2017
- Applied Materials, Inc.
- Chengtsin Lee
- B08 - CLEANING
Information Patent Application
SMART DEVICE FABRICATION VIA PRECISION PATTERNING
- Publication number 20160329195
- Publication date Nov 10, 2016
- Jennifer Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED LAYERED BULK CERAMICS VIA FIELD ASSISTED SINTERING TECHNOLOGY
- Publication number 20150329430
- Publication date Nov 19, 2015
- Applied Materials, Inc.
- Jennifer Y. Sun
- B32 - LAYERED PRODUCTS
Information Patent Application
PLASMA SPRAY COATING DESIGN USING PHASE AND STRESS CONTROL
- Publication number 20150329955
- Publication date Nov 19, 2015
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SLURRY PLASMA SPRAY OF PLASMA RESISTANT CERAMIC COATING
- Publication number 20150321964
- Publication date Nov 12, 2015
- Applied Materials, Inc.
- Jennifer Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SMART DEVICE FABRICATION VIA PRECISION PATTERNING
- Publication number 20150129574
- Publication date May 14, 2015
- Jennifer SUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA SPRAY COATING ENHANCEMENT USING PLASMA FLAME HEAT TREATMENT
- Publication number 20150075714
- Publication date Mar 19, 2015
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING ARCHITECTURE FOR PLASMA SPRAYED CHAMBER COMPONENTS
- Publication number 20150079370
- Publication date Mar 19, 2015
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Substrate support cover for high-temperature corrosive environment

Plasma spray coating design using phase and stress control

Protective metal oxy-fluoride coatings

Coating for chamber particle reduction

Protective yttria coating for semiconductor equipment parts

Smart device fabrication via precision patterning

Slurry plasma spray of plasma resistant ceramic coating

Plasma spray coating design using phase and stress control

Plasma spray coating enhancement using plasma flame heat treatment

Advanced layered bulk ceramics via field assisted sintering technology

Plasma spray coating design using phase and stress control

Cleaning process that precipitates yttrium oxy-flouride

Smart device fabrication via precision patterning

Patents Applicationslast 30 patents

Heated Pedestal With Impedance Matching Radio Frequency (RF) Rod

PROTECTIVE METAL OXY-FLUORIDE COATINGS

METHODS AND APPARATUS FOR PLASMA SPRAYING SILICON CARBIDE COATINGS...

FLUORIDE COATING TO IMPROVE CHAMBER PERFORMANCE

COATING FOR CHAMBER PARTICLE REDUCTION

SUBSTRATE SUPPORT COVER FOR HIGH-TEMPERATURE CORROSIVE ENVIRONMENT

SLURRY PLASMA SPRAY OF PLASMA RESISTANT CERAMIC COATING

PLASMA SPRAY COATING DESIGN USING PHASE AND STRESS CONTROL

PLASMA SPRAY COATING ENHANCEMENT USING PLASMA FLAME HEAT TREATMENT

PROTECTIVE YTTRIA COATING FOR SEMICONDUCTOR EQUIPMENT PARTS

PLASMA SPRAY COATING ENHANCEMENT USING GRADUATED PARTICLE FEED RATE

PLASMA SPRAY COATING DESIGN USING PHASE AND STRESS CONTROL

COATING ARCHITECTURE FOR PLASMA SPRAYED CHAMBER COMPONENTS

COATING ARCHITECTURE FOR PLASMA SPRAYED CHAMBER COMPONENTS

PROTECTIVE METAL OXY-FLUORIDE COATINGS

COATING ARCHITECTURE FOR PLASMA SPRAYED CHAMBER COMPONENTS

SOLUTION PRECURSOR PLASMA SPRAY OF CERAMIC COATING FOR SEMICONDUCTO...

CLEANING PROCESS THAT PRECIPITATES YTTRIUM OXY-FLOURIDE

SMART DEVICE FABRICATION VIA PRECISION PATTERNING

ADVANCED LAYERED BULK CERAMICS VIA FIELD ASSISTED SINTERING TECHNOLOGY

PLASMA SPRAY COATING DESIGN USING PHASE AND STRESS CONTROL

SLURRY PLASMA SPRAY OF PLASMA RESISTANT CERAMIC COATING

SMART DEVICE FABRICATION VIA PRECISION PATTERNING

PLASMA SPRAY COATING ENHANCEMENT USING PLASMA FLAME HEAT TREATMENT

COATING ARCHITECTURE FOR PLASMA SPRAYED CHAMBER COMPONENTS