Yim Bun P. Kwan

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Balanced positioning system for use in lithographic apparatus
- Patent number 7,202,937
- Issue date Apr 10, 2007
- ASML Netherlands B.V.
- Yim Bun P. Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Balanced positioning system for use in lithographic apparatus
- Patent number 7,034,920
- Issue date Apr 25, 2006
- ASML Netherlands B.V.
- Yim Bun P. Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Balanced positioning system for use in lithographic apparatus
- Patent number 6,924,882
- Issue date Aug 2, 2005
- ASML Netherlands B.V.
- Yim Bun P. Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning system for use in lithographic apparatus
- Patent number 6,852,989
- Issue date Feb 8, 2005
- ASML Netherlands B.V.
- Yim Bun P. Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning device having two object holders
- Patent number 6,262,796
- Issue date Jul 17, 2001
- ASM Lithography B.V.
- Erik R. Loopstra
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Balanced positioning system for use in lithographic apparatus
- Publication number 20060203216
- Publication date Sep 14, 2006
- ASML NETHERLANDS B.V.
- Yim Bun P. Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Balanced positioning system for use in lithographic apparatus
- Publication number 20050206865
- Publication date Sep 22, 2005
- ASML Netherlands B.V.
- Yim Bun Patrick Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Position measuring device, position measuring system, lithographic...
- Publication number 20040211921
- Publication date Oct 28, 2004
- ASML NETHERLANDS B.V.
- Thomas J.M. Castenmiller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Balanced positioning system for use in lithographic apparatus
- Publication number 20040041994
- Publication date Mar 4, 2004
- ASML NETHERLANDS B.V.
- Yim Bun P. Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Balanced positioning system for use in lithographic apparatus
- Publication number 20020191173
- Publication date Dec 19, 2002
- ASML Netherlands B.V.
- Yim Bun P. Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Balanced positioning system for use lithographic apparatus
- Publication number 20020048009
- Publication date Apr 25, 2002
- Yim Bun P. Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning system for use in lithographic apparatus
- Publication number 20010050341
- Publication date Dec 13, 2001
- Yim Bun P. Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic projection apparatus having a temperature controlled h...
- Publication number 20010013925
- Publication date Aug 16, 2001
- Erik R. Loopstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Balanced positioning system for use in lithographic apparatus
- Publication number 20010006762
- Publication date Jul 5, 2001
- Yim Bun P. Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Crash prevention in positioning apparatus for use in lithographic p...
- Publication number 20010004105
- Publication date Jun 21, 2001
- Yim Bun P. Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yim Bun P. Kwan

Person

Patents Grantslast 30 patents

Balanced positioning system for use in lithographic apparatus

Balanced positioning system for use in lithographic apparatus

Balanced positioning system for use in lithographic apparatus

Positioning system for use in lithographic apparatus

Positioning device having two object holders

Patents Applicationslast 30 patents

Balanced positioning system for use in lithographic apparatus

Balanced positioning system for use in lithographic apparatus

Position measuring device, position measuring system, lithographic...

Balanced positioning system for use in lithographic apparatus

Balanced positioning system for use in lithographic apparatus

Balanced positioning system for use lithographic apparatus

Positioning system for use in lithographic apparatus

Lithographic projection apparatus having a temperature controlled h...

Balanced positioning system for use in lithographic apparatus

Crash prevention in positioning apparatus for use in lithographic p...