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Yim Bun Patrick Kwan
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Munich, DE
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Patents Grants
last 30 patents
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Patent Grant
Cooling of voice coil motors
Patent number
7,057,313
Issue date
Jun 6, 2006
ASML Netherlands B.V.
Edwin J. Buis
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
Information
Patent Application
OPTICAL IMAGING ARRANGEMENT WITH INDIVIDUALLY ACTIVELY SUPPORTED CO...
Publication number
20140176927
Publication date
Jun 26, 2014
Yim-Bun Patrick Kwan
G02 - OPTICS
Information
Patent Application
Cooling of voice coil motors
Publication number
20050056792
Publication date
Mar 17, 2005
ASML NETHERLANDS B.V.
Edwin J. Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Cooling of voice coil motors in lithographic projection apparatus
Publication number
20040079898
Publication date
Apr 29, 2004
ASML NETHERLANDS B.V.
Edwin J. Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20020041380
Publication date
Apr 11, 2002
Yim Bun Patrick Kwan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for calibrating a lithographic projection apparatus and appa...
Publication number
20020026878
Publication date
Mar 7, 2002
Yim Bun Patrick Kwan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Cooling of voice coil motors in lithographic projection apparatus
Publication number
20010013580
Publication date
Aug 16, 2001
Edwin J. Buis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY