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Yim Bun Patrick Kwan
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Aalen, DE
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,696,630
Issue date
Jul 4, 2017
ASML Netherlands B.V.
Marc Wilhelmus Maria Van Der Wijst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,134,632
Issue date
Sep 15, 2015
ASML Netherlands B.V.
Marc Wilhelmus Maria Van Der Wijst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
6,819,425
Issue date
Nov 16, 2004
ASML Netherland B.V.
Yim Bun Patrick Kwan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for calibrating a lithographic projection apparatus and appa...
Patent number
6,710,849
Issue date
Mar 23, 2004
ASML Netherlands B.V.
Yim Bun Patrick Kwan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cooling of voice coil motors in lithographic projection apparatus
Patent number
6,657,204
Issue date
Dec 2, 2003
ASML Netherlands B.V.
Edwin J. Buis
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Patents Applications
last 30 patents
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Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20160004170
Publication date
Jan 7, 2016
ASML NETHERLANDS B.V.
Marc Wilhelmus Maria VAN DER WIJST
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method and device manu...
Publication number
20040263846
Publication date
Dec 30, 2004
ASML NETHERLANDS B.V.
Yim Bun Patrick Kwan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device manufacturing method, device manufactured thereby and lithog...
Publication number
20030198787
Publication date
Oct 23, 2003
ASML NETHERLANDS, B.V.
Yim Bun Patrick Kwan
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS