Yimbun P. Kwan

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Eindhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Position measuring system for use in lithographic apparatus
- Patent number 6,894,261
- Issue date May 17, 2005
- ASML Netherlands B.V.
- Thomas J. M. Castenmiller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measuring device, position measuring system, lithographic...
- Patent number 6,875,992
- Issue date Apr 5, 2005
- ASML Netherlands B.V.
- Thomas J. M. Castenmiller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Position detection system for use in lithographic apparatus
- Publication number 20010011712
- Publication date Aug 9, 2001
- Thomas J.M. Castenmiller
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY