Yimin WU

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Compensation method for overlay deviation
- Patent number 12,124,175
- Issue date Oct 22, 2024
- Semiconductor Manufacturing South China Corporation
- Hai Zhang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEVICE MANAGEMENT SYSTEM, METHOD AND APPARATUS
- Publication number 20240412578
- Publication date Dec 12, 2024
- HEMA (CHINA) CO., LTD.
- Enliang SONG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMPENSATION METHOD FOR OVERLAY DEVIATION
- Publication number 20220066329
- Publication date Mar 3, 2022
- Semiconductor Manufacturing South China Corporation
- Hai ZHANG
- H01 - BASIC ELECTRIC ELEMENTS