Yiming Chiu

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Zhubei, TW

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Patents Grantslast 30 patents

Information Patent Grant
Solution for EUV power increment at wafer level
- Patent number 9,992,856
- Issue date Jun 5, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- En-Chao Shen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solution for EUV power increment at wafer level
- Patent number 9,451,683
- Issue date Sep 20, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- En-Chao Shen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
NOVEL SOLUTION FOR EUV POWER INCREMENT AT WAFER LEVEL
- Publication number 20170019981
- Publication date Jan 19, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- En-Chao Shen
- G02 - OPTICS