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Patents Grants
last 30 patents
Information
Patent Grant
Cylindrical reticle system, exposure apparatus and exposure method
Patent number
9,323,163
Issue date
Apr 26, 2016
Semiconductor Manufacturing International (Shanghai) Corporation
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and exposure method thereof
Patent number
9,298,099
Issue date
Mar 29, 2016
Semiconductor Manufacturing International (Shanghai) Corporation
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure device and exposure method
Patent number
9,223,229
Issue date
Dec 29, 2015
Semiconductor Manufacturing International Corp
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography machine and scanning and exposing method thereof
Patent number
9,134,624
Issue date
Sep 15, 2015
Semiconductor Manufacturing International Corp
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method, optical module and auto-focusing system for wafer edge expo...
Patent number
9,081,149
Issue date
Jul 14, 2015
Semiconductor Manufacturing International (Beijing) Corporation
Qiang Wu
G02 - OPTICS
Information
Patent Grant
Method of forming double pattern in a structure
Patent number
9,070,557
Issue date
Jun 30, 2015
Semiconductor Manufacturing International Corp
Daniel Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photolithographic apparatus
Patent number
8,982,314
Issue date
Mar 17, 2015
Semiconductor Manufacturing International (Beijing) Corporation
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for forming double patterned structure
Patent number
8,853,093
Issue date
Oct 7, 2014
Semiconductor Manufacturing International Corp
Daniel Hu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
DEEP-SEA SOUND SOURCE LOCALIZATION METHOD, COMPUTER DEVICE, AND STO...
Publication number
20250147145
Publication date
May 8, 2025
INSTITUTE OF ACOUSTICS, CHINESE ACADEMY OF SCIENCES
Jixing QIN
G01 - MEASURING TESTING
Information
Patent Application
CYLINDRICAL RETICLE SYSTEM, EXPOSURE APPARATUS AND EXPOSURE METHOD
Publication number
20140253895
Publication date
Sep 11, 2014
Semiconductor Manufacturing International (Shanghai) Corporation
QIANG WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD THEREOF
Publication number
20140253896
Publication date
Sep 11, 2014
Semiconductor Manufacturing International (Shanghai) Corporation
QIANG WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE DEVICE AND EXPOSURE METHOD
Publication number
20140063480
Publication date
Mar 6, 2014
SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
Qiang WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD
Publication number
20130234302
Publication date
Sep 12, 2013
SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
DANIEL HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD
Publication number
20130234294
Publication date
Sep 12, 2013
SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
DANIEL HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHY MACHINE AND SCANNING AND EXPOSING METHOD THEREOF
Publication number
20130169946
Publication date
Jul 4, 2013
SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
Qiang WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTO-RESIST AND METHOD OF PHOTOLITHOGRAPHY
Publication number
20130084526
Publication date
Apr 4, 2013
Semiconductor Manufacturing International (Beijing) Corporaiton
Qiang Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD, OPTICAL MODULE AND AUTO-FOCUSING SYSTEM FOR WAFER EDGE EXPO...
Publication number
20130083305
Publication date
Apr 4, 2013
Semiconductor Manufacturing International (Beijing) Corporation
Qiang WU
G02 - OPTICS
Information
Patent Application
PHOTOLITHOGRAPHIC APPARATUS
Publication number
20130083302
Publication date
Apr 4, 2013
Semiconductor Manufacturing International (Beijing) Corporation
Qiang WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY