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San Jose, CA, US
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last 30 patents
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Patent Grant
Multi-step pre-clean for selective metal gap fill
Patent number
11,776,806
Issue date
Oct 3, 2023
Applied Materials, Inc.
Xi Cen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-step pre-clean for selective metal gap fill
Patent number
11,380,536
Issue date
Jul 5, 2022
Applied Materials, Inc.
Xi Cen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming a metal gapfill
Patent number
11,355,391
Issue date
Jun 7, 2022
Applied Materials, Inc.
Xi Cen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
MULTI-STEP PRE-CLEAN FOR SELECTIVE METAL GAP FILL
Publication number
20220270871
Publication date
Aug 25, 2022
Applied Materials, Inc.
Xi Cen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-Step Pre-Clean for Selective Metal Gap Fill
Publication number
20210351032
Publication date
Nov 11, 2021
Applied Materials, Inc.
Xi Cen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING A METAL GAPFILL
Publication number
20200303250
Publication date
Sep 24, 2020
Applied Materials, Inc.
Xi CEN
H01 - BASIC ELECTRIC ELEMENTS