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Yin-Shuo CHU
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Taichung City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor device structure with anti-acid layer and method for...
Patent number
11,158,659
Issue date
Oct 26, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Yin-Shuo Chu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Prevention of trench photoresist scum
Patent number
7,820,553
Issue date
Oct 26, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Yin-Shen Chu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for selectively controlling damascene CD bias
Patent number
6,972,258
Issue date
Dec 6, 2005
Taiwan Semiconductor Manufacturing Co., Ltd
Yin-Shen Chu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for removing polymeric residue contamination on semiconducto...
Patent number
6,884,728
Issue date
Apr 26, 2005
Taiwan Semiconductor Manufacturing Co., Ltd
Jun-Lung Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for protecting a wafer backside from etching damage
Patent number
6,777,334
Issue date
Aug 17, 2004
Taiwan Semiconductor Manufacturing Co., Ltd
Le Der Shiu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Semiconductor Device Structure with Anti-Acid Layer and Method for...
Publication number
20180350855
Publication date
Dec 6, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Yin-Shuo CHU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH ANTI-ACID LAYER AND METHOD FOR...
Publication number
20170170215
Publication date
Jun 15, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Yin-Shuo CHU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Prevention of trench photoresist scum
Publication number
20070020921
Publication date
Jan 25, 2007
Taiwan Semiconductor Manufacturing Company. Ltd.
Yin-Shen Chu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for selectively controlling damascene CD bias
Publication number
20050032354
Publication date
Feb 10, 2005
Taiwan Semiconductor Manufacturing Co., Ltd.
Yin-Shen Chu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pre-etching plasma treatment to form dual damascene with improved p...
Publication number
20040192058
Publication date
Sep 30, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Yin-Shen Chu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for removing polymeric residue contamination on semiconducto...
Publication number
20040087167
Publication date
May 6, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Jun-Lung Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for protecting a wafer backside from etching damage
Publication number
20040018732
Publication date
Jan 29, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.
Le Der Shiu
H01 - BASIC ELECTRIC ELEMENTS