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Ying Holden
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San Jose, CA, US
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last 30 patents
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Patent Grant
Systems and methods for two-sided etch of a semiconductor substrate
Patent number
6,624,082
Issue date
Sep 23, 2003
Mattson Technology, Inc.
Laizhong Luo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Systems and methods for two-sided etch of a semiconductor substrate
Patent number
6,335,293
Issue date
Jan 1, 2002
Mattson Technology, Inc.
Laizhong Luo
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Systems and methods for two-sided etch of a semiconductor substrate
Publication number
20020017364
Publication date
Feb 14, 2002
Laizhong Luo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SYSTEMS AND METHODS FOR TWO-SIDED ETCH OF A SEMICONDUCTOR SUBSTRATE
Publication number
20010009177
Publication date
Jul 26, 2001
LAIZHONG LUO
H01 - BASIC ELECTRIC ELEMENTS