Ying-Hsueh Chang Chien

Person

Hsinchu City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Fine temperature controllable wafer heating system
- Patent number 10,020,209
- Issue date Jul 10, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fine temperature controllable wafer heating system
- Patent number 9,349,623
- Issue date May 24, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device cleaning method and apparatus
- Patent number 9,299,593
- Issue date Mar 29, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hsi Yeh
- B08 - CLEANING
Information Patent Grant
Apparatus and methods for movable megasonic wafer probe
- Patent number 8,926,762
- Issue date Jan 6, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- B08 - CLEANING
Information Patent Grant
Semiconductor devices and methods of manufacture thereof
- Patent number 8,871,639
- Issue date Oct 28, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ backside cleaning of semiconductor substrate
- Patent number 8,657,963
- Issue date Feb 25, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hsi Yeh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GIGASONIC CLEANING TECHNIQUES
- Publication number 20170066021
- Publication date Mar 9, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Ying-Hsueh Chang Chien
- B08 - CLEANING
Information Patent Application
Fine Temperature Controllable Wafer Heating System
- Publication number 20160268147
- Publication date Sep 15, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Devices Employing a Barrier Layer
- Publication number 20150001723
- Publication date Jan 1, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fine Temperature Controllable Wafer Heating System
- Publication number 20140273302
- Publication date Sep 18, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Devices and Methods of Manufacture Thereof
- Publication number 20140191400
- Publication date Jul 10, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU BACKSIDE CLEANING OF SEMICONDUCTOR SUBSTRATE
- Publication number 20130074872
- Publication date Mar 28, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd., ("TSMC")
- Ming-Hsi Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE CLEANING METHOD
- Publication number 20130068248
- Publication date Mar 21, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd., ("TSMC")
- Ming-Hsi Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Methods for Movable Megasonic Wafer Probe
- Publication number 20130056031
- Publication date Mar 7, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Hsueh Chang Chien
- B08 - CLEANING
Information Patent Application
SEMICONDUCTOR DEVICE CLEANING METHOD AND APPARATUS
- Publication number 20130045606
- Publication date Feb 21, 2013
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. ("TSMC")
- Ming-Hsi Yeh
- B08 - CLEANING
Information Patent Application
CHEMICAL DISPERSION METHOD AND DEVICE
- Publication number 20130034966
- Publication date Feb 7, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd., ("TSMC")
- Ming-Hsi Yeh
- H01 - BASIC ELECTRIC ELEMENTS

Ying-Hsueh Chang Chien

Person

Patents Grantslast 30 patents

Fine temperature controllable wafer heating system

Fine temperature controllable wafer heating system

Semiconductor device cleaning method and apparatus

Apparatus and methods for movable megasonic wafer probe

Semiconductor devices and methods of manufacture thereof

In-situ backside cleaning of semiconductor substrate

Patents Applicationslast 30 patents

GIGASONIC CLEANING TECHNIQUES

Fine Temperature Controllable Wafer Heating System

Semiconductor Devices Employing a Barrier Layer

Fine Temperature Controllable Wafer Heating System

Semiconductor Devices and Methods of Manufacture Thereof

IN-SITU BACKSIDE CLEANING OF SEMICONDUCTOR SUBSTRATE

SEMICONDUCTOR DEVICE CLEANING METHOD

Apparatus and Methods for Movable Megasonic Wafer Probe

SEMICONDUCTOR DEVICE CLEANING METHOD AND APPARATUS

CHEMICAL DISPERSION METHOD AND DEVICE