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Hsinchu City, TW
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last 30 patents
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Patent Grant
Multi-cycle wafer cleaning method
Patent number
9,687,885
Issue date
Jun 27, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Ying-Jie Cai
B08 - CLEANING
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last 30 patents
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Patent Application
MULTI-CYCLE WAFER CLEANING METHOD
Publication number
20170014871
Publication date
Jan 19, 2017
Taiwan Semiconductor Manufacturing Co., LTD
Ying-Jie CAI
B08 - CLEANING