Ying-Sheng Lin

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma reactor electrostatic chuck with cooled process ring and hea...
- Patent number 9,070,536
- Issue date Jun 30, 2015
- Applied Materials, Inc.
- Michael D. Willwerth
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PRESSURE CONTROLLER CONFIGURATION FOR SEMICONDUCTOR PROCESSING APPL...
- Publication number 20140311581
- Publication date Oct 23, 2014
- Applied Materials, Inc.
- Sergey G. Belostotskiy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION SHIELD FOR PLASMA ENHANCED SUBSTRATE PROCESSING
- Publication number 20140151331
- Publication date Jun 5, 2014
- Applied Materials, Inc.
- VALENTIN N. TODOROW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA REACTOR ELECTROSTATIC CHUCK WITH COOLED PROCESS RING AND HEA...
- Publication number 20130277339
- Publication date Oct 24, 2013
- Michael D. Willwerth
- H01 - BASIC ELECTRIC ELEMENTS