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Footing Removal in Cut-Metal Process
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Publication number 20240096707
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Publication date Mar 21, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Ming-Chi Huang
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H01 - BASIC ELECTRIC ELEMENTS
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ANISOTROPIC WET ETCHING IN PATTERNING
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Publication number 20230420265
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Publication date Dec 28, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Tefu Yeh
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H01 - BASIC ELECTRIC ELEMENTS
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ETCH METHOD FOR INTERCONNECT STRUCTURE
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Publication number 20230386898
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Publication date Nov 30, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Chun-Cheng Chou
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H01 - BASIC ELECTRIC ELEMENTS
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ETCH METHOD FOR INTERCONNECT STRUCTURE
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Publication number 20230067300
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Publication date Mar 2, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Chun-Cheng Chou
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H01 - BASIC ELECTRIC ELEMENTS
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SEMICONDUCTOR DEVICE STRUCTURE
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Publication number 20220376079
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Publication date Nov 24, 2022
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Hsiang-Ku SHEN
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H01 - BASIC ELECTRIC ELEMENTS
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Metal Gate Using Monolayers
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Publication number 20220173226
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Publication date Jun 2, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Ju-Li Huang
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H01 - BASIC ELECTRIC ELEMENTS
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Footing Removal in Cut-Metal Process
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Publication number 20210057287
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Publication date Feb 25, 2021
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Ming-Chi Huang
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H01 - BASIC ELECTRIC ELEMENTS
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