Ying Xiao

Person

Zhubei City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Control system for plasma chamber having controllable valve
- Patent number 11,821,089
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Shuo Su
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control system for plasma chamber having controllable valve and met...
- Patent number 10,787,742
- Issue date Sep 29, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Shuo Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone EPD detectors
- Patent number 9,887,071
- Issue date Feb 6, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-An Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma chamber having an upper electrode having controllable valves...
- Patent number 9,840,778
- Issue date Dec 12, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Shuo Su
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etcher design with effective no-damage in-situ ash
- Patent number 9,786,471
- Issue date Oct 10, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying Xiao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Source/drain structure of semiconductor device
- Patent number 9,472,647
- Issue date Oct 18, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of controlling semiconductor wafer fabrication...
- Patent number 9,368,379
- Issue date Jun 14, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Hung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and apparatus
- Patent number 9,252,023
- Issue date Feb 2, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Hung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadport bridge for semiconductor fabrication tools
- Patent number 8,944,739
- Issue date Feb 3, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Hung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Source/drain structure of semiconductor device
- Patent number 8,940,640
- Issue date Jan 27, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma process, film deposition method and system using rotary chuck
- Patent number 8,920,888
- Issue date Dec 30, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Lung Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of shallow trench isolation using chemical vapor etch
- Patent number 7,919,335
- Issue date Apr 5, 2011
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying Xiao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONTROL SYSTEM FOR PLASMA CHAMBER HAVING CONTROLLABLE VALVE
- Publication number 20210010137
- Publication date Jan 14, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Shuo SU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL SYSTEM FOR PLASMA CHAMBER HAVING CONTROLLABLE VALVE AND MET...
- Publication number 20180073144
- Publication date Mar 15, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Shuo SU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Source/Drain Structure of Semiconductor Device
- Publication number 20150108543
- Publication date Apr 23, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOURCE/DRAIN STRUCTURE OF SEMICONDUCTOR DEVICE
- Publication number 20140264445
- Publication date Sep 18, 2014
- Ying Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOADPORT BRIDGE FOR SEMICONDUCTOR FABRICATION TOOLS
- Publication number 20130322990
- Publication date Dec 5, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Hung CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CHAMBER HAVING AN UPPER ELECTRODE HAVING CONTROLLABLE VALVES...
- Publication number 20130319612
- Publication date Dec 5, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Shuo SU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESS, FILM DEPOSITION METHOD AND SYSTEM USING ROTARY CHUCK
- Publication number 20130264308
- Publication date Oct 10, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Lung YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS OF CONTROLLING SEMICONDUCTOR WAFER FABRICATION...
- Publication number 20130245978
- Publication date Sep 19, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Hung CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Etcher Design with Effective No-Damage In-Situ Ash
- Publication number 20130160795
- Publication date Jun 27, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Ying Xiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-zone EPD Detectors
- Publication number 20130157387
- Publication date Jun 20, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Chien-An Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching Method and Apparatus
- Publication number 20130072013
- Publication date Mar 21, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Hung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Formation of Shallow Trench Isolation Using Chemical Vapor Etch
- Publication number 20100267172
- Publication date Oct 21, 2010
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying XIAO
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Control system for plasma chamber having controllable valve

Control system for plasma chamber having controllable valve and met...

Multi-zone EPD detectors

Plasma chamber having an upper electrode having controllable valves...

Plasma etcher design with effective no-damage in-situ ash

Source/drain structure of semiconductor device

Systems and methods of controlling semiconductor wafer fabrication...

Etching method and apparatus

Loadport bridge for semiconductor fabrication tools

Source/drain structure of semiconductor device

Plasma process, film deposition method and system using rotary chuck

Formation of shallow trench isolation using chemical vapor etch

Patents Applicationslast 30 patents

CONTROL SYSTEM FOR PLASMA CHAMBER HAVING CONTROLLABLE VALVE

CONTROL SYSTEM FOR PLASMA CHAMBER HAVING CONTROLLABLE VALVE AND MET...

Source/Drain Structure of Semiconductor Device

SOURCE/DRAIN STRUCTURE OF SEMICONDUCTOR DEVICE

LOADPORT BRIDGE FOR SEMICONDUCTOR FABRICATION TOOLS

PLASMA CHAMBER HAVING AN UPPER ELECTRODE HAVING CONTROLLABLE VALVES...

PLASMA PROCESS, FILM DEPOSITION METHOD AND SYSTEM USING ROTARY CHUCK

SYSTEMS AND METHODS OF CONTROLLING SEMICONDUCTOR WAFER FABRICATION...

Plasma Etcher Design with Effective No-Damage In-Situ Ash

Multi-zone EPD Detectors

Etching Method and Apparatus

Formation of Shallow Trench Isolation Using Chemical Vapor Etch