Ying Zhu

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Time-resolved OES data collection
- Patent number 12,158,374
- Issue date Dec 3, 2024
- Tokyo Electron Limited
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Grant
Parallel profile determination in optical metrology
- Patent number 7,515,283
- Issue date Apr 7, 2009
- Tokyo Electron, Ltd.
- Tri Thanh Khuong
- G01 - MEASURING TESTING
Information Patent Grant
Parallel profile determination for an optical metrology system
- Patent number 7,469,192
- Issue date Dec 23, 2008
- Tokyo Electron Ltd.
- Tri Thanh Khuong
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Advanced OES Characterization
- Publication number 20240339309
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for OES Data Collection and Endpoint Detection
- Publication number 20240234111
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Time-Resolved OES Data Collection
- Publication number 20240230409
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Application
Time-Resolved OES Data Collection
- Publication number 20240133742
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Application
Method for OES Data Collection and Endpoint Detection
- Publication number 20240136164
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical Emission Spectroscopy for Advanced Process Characterization
- Publication number 20240094056
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Parallel profile determination for an optical metrology system
- Publication number 20080015812
- Publication date Jan 17, 2008
- TOKYO ELECTRON LIMITED
- Tri Thanh Khuong
- G01 - MEASURING TESTING
Information Patent Application
Parallel profile determination in optical metrology
- Publication number 20080013108
- Publication date Jan 17, 2008
- TOKYO ELECTRON LIMITED
- Tri Thanh Khuong
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Time-resolved OES data collection

Parallel profile determination in optical metrology

Parallel profile determination for an optical metrology system

Patents Applicationslast 30 patents

Advanced OES Characterization

Method for OES Data Collection and Endpoint Detection

Time-Resolved OES Data Collection

Time-Resolved OES Data Collection

Method for OES Data Collection and Endpoint Detection

Optical Emission Spectroscopy for Advanced Process Characterization

Parallel profile determination for an optical metrology system

Parallel profile determination in optical metrology