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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Method for controlling a lithographic apparatus
Patent number
11,809,088
Issue date
Nov 7, 2023
ASML Netherlands B.V.
Hadi Yagubizade
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
DETERMINING LITHOGRAPHIC MATCHING PERFORMANCE
Publication number
20220334503
Publication date
Oct 20, 2022
ASML NETHERLANDS B.V.
Yingchao CUI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CONTROLLING A LITHOGRAPHIC APPARATUS
Publication number
20220334500
Publication date
Oct 20, 2022
ASML NETHERLANDS B.V.
Hadi YAGUBIZADE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY