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Titanium film
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Patent number 6,509,102
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Issue date Jan 21, 2003
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Honeywell International Inc.
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Yinshi Liu
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C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
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Method of making a target
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Patent number 6,302,977
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Issue date Oct 16, 2001
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Johnson Matthey Electronics, Inc.
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Yinshi Liu
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C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
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Titanium sputtering target
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Patent number 5,993,621
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Issue date Nov 30, 1999
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Johnson Matthey Electronics, Inc.
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Yinshi Liu
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C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
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